“MEMS Design Software”
Successful MEMS suppliers verify all aspects of their designs with simulations before sending them to the fab. Successful MEMS suppliers use the CoventorWare® design and simulation platform.
Accelerometer model built in CoventorWare with a process design kit (PDK) for imec’s monolithic MEMS/CMOS process
CoventorWare is an integrated suite of design and simulation software that has the accuracy, capacity, and speed to address real-world MEMS designs. The suite has many MEMS-specific features for modeling and simulating a wide range of MEMS devices, including inertial sensors (accelerometers and gyros),microphones, resonators, and actuators. The included field solvers provide comprehensive coverage of MEMS-specific multi-physics, such as electrostatics, coupled electro-mechanics, piezoelectric, piezoresistive, and damping effects.
2-D layout and 3-D modeling for MEMS Coventor’s DESIGNER is an efficient front-end design tool for creating models of MEMS devices. It combines a fully functional 2-D mask layout program, process editor, materials properties database, and a preprocessor module for 3-D model generation and viewing. The models can be used for export to FEM/BEM simulation verification, while the 2-D files can be exported for mask set foundry processing.
Simulated displacement due to fabrication-induced residual stress in mechanical layer of an accelerometer
Simulation of electrostatically actuated RF switch
Simulated displacement of bulk-micromachined, piezo-resistive pressure sensor