MEMS is an Integration of mechanical elements and electronics which either gets packaged into a single chip or become part of a system. Coventor identified a need for better integration and standardization of MEMS and System level design flow. The result of this is MEMS+, a common design platform for MEMS products that is fully integrated with the Mathwork’s Matlab Simulink and Cadence’s Virtuoso simulation environment. The designer can make the solid model of the MEMS device in MEMS+ using the library components available inside the tool. An equivalent parametric model of this MEMS device can be exported in the form of a symbol into MATLAB SIMULINK or Cadence Virtuoso environment. A schematic of the system can be build using this symbol. Then System level simulations can be performed using simulation capabilities available in MATLAB SIMULINK or fully integrated with Cadence Virtuoso environment for MEMS and IC design flow.