Coventor® , a Lam Research company, is a market leader in automated solutions for developing semiconductor process technology, as well as micro-electromechanical systems (MEMS).

Coventor serves a worldwide customer base of integrated device manufacturers, memory suppliers, fabless design houses, independent foundries, and R&D organizations. Its MEMS design solutions are used to develop MEMS-based products for automotive, aerospace, industrial, defense, and consumer electronics applications, including smart phones, tablets, and gaming systems.


Coventor offers integrated products for MEMS design: CoventorMP®, MEMS+® and CoventorWare®.

These software tools are ideal for MEMS devices that employ mechanical, electrostatic, piezo-electric, piezo-resistive, or thermal effects for sensing or actuation. CoventorMP is a unified design platform for MEMS design, that allows transfer of MEMS device models between the MEMS+ and CoventorWare design software products. MEMS+ and CoventorWare work seamlessly together in the CoventorMP framework. They provide a design platform that enables MEMS designers to simulate critical end-product performance specs such as sensitivity, linearity, frequency response, signal-to-noise ratio, temperature stability or actuation time. Both products are useful in all phases of a typical MEMS development program.


CoventorMP Software Features

CoventorMP combines the complementary strengths of Coventor’s industry-leading software tools for MEMS design, CoventorWare® and MEMS+®, into a single powerful environment for MEMS design automation. The new platform provides a cohesive environment where designs can be entered once and used to create conventional finite element models (CoventorWare) and compact finite element models (MEMS+).

The CoventorMP platform provides a unified environment for MEMS design, starting from fully parametric design entry to the production of functional models that can be simulated at all levels of abstraction.


Rapid design exploration and optimization. Models are assembled from a library of parametric, high-order finite elements and can simulate up to 100X faster than conventional FEA, enabling

  • Modal analysis
  • Quasi-static coupled electro-mechanics (pull-in, lift-off, electrostatic spring softening)
  • Harmonic analysis
  • Sensitivity studies of design and fabrication variables
  • Transient simulations of electro-mechanical behavior fully coupled with gas damping effects
  • Closed-loop system simulation in Simulink and Cadence
  • Noise analysis in Cadence Spectre and APS simulators
  • Inclusion of package/substrate deformation effects on sensor performance


Detailed device analysis with a suite of FEM/BEM solvers. The 2D-to-3D model builder, automatic meshing and field solvers are optimized for MEMS structures and multi-physics, addressing most types of MEMS:

  • Modal analysis
  • Quasi-static coupled electro-mechanics (pull-in, lift-off, electrostatic spring softening)
  • Harmonic analysis
  • Fast-frequency-sweep algorithm for piezoelectric BAW resonators
  • Gas damping for any 3D geometry
  • Energy dissipation from thermo-elastic damping and anchor losses
  • Sensitivity analysis of piezo-resistive sensors
  • Detailed stress analysis


MEMS+® is a software platform for engineers who design MEMS devices and integrate MEMS devices with CMOS circuits and packaging. It is ideal for designing and optimizing MEMS-based components such as motion sensors (accelerometers and gyroscopes), microphones, micro-mirrors, micro-switches, timing devices and energy harvesters.

MEMS+ users assemble advanced finite elements, or fundamental MEMS-specific building blocks, into a completed design. These MEMS+ designs provide simulation results up to 100 times faster than conventional finite element analysis tools. The dramatic improvement in simulation time makes it feasible to analyze complex multiphysics behavior and improve the performance and reliability of product designs. MEMS+ designs can be directly included in MathWorks system models and Cadence circuit designs.

Key Benefits of MEMS+

Design up to 100X faster than possible using conventional finite element analysis tools.

Study complex design and manufacturing issues not practical with conventional design software.

Quickly analyze combined MEMS and IC designs in the MathWorks and Cadence design environments without the effort of crafting custom models.

Accurately model the behavior of designs without the time and expense of device fabrication and testing.



CoventorWare is an integrated suite of design and simulation software that has the accuracy, capacity, and speed to address real-world MEMS designs. The suite has many MEMS-specific features for modeling and simulating a wide range of MEMS devices, including inertial sensors (accelerometers and gyros), microphones, resonators, and actuators. The included field solvers provide comprehensive coverage of MEMS-specific multi-physics, such as electrostatics, coupled electro-mechanics, piezoelectric, piezoresistive, and damping effects.

Whether exploring design concepts or performing detailed verification of device behavior, CoventorWare users leverage years of Coventor’s MEMS simulation experience and continuous improvement as well as the ever-increasing power of high-performance computers. Widely recognized within the MEMS industry as the best-in-class solution for multi-physics MEMS simulation, CoventorWare sets the standard for MEMS simulation accuracy, capacity and speed.